Quartz · Silicon · Ceramics · Refurbishment
Precision parts for the chambers that can’t stop.
Advance Semiconductor fabricates fused quartzware, mono-cast silicon parts and technical ceramics for semiconductor process tools — and cleans, repairs and requalifies the hardware already inside them. Independent, Santa Clara since 2004, with production at VSIP, Vietnam.
Two ways in
Equipment builders and the fabs that run their tools.
The two buy differently. An OEM needs parts built to print, qualified once and repeated exactly. A fab needs the part that failed last shift, cleaned or replaced, back in the tool. We are set up for both.
Build to print, then repeat it
New-part fabrication from your drawings, design and R&D support before the drawing is frozen, and volume production once it is. Copy Exact™ discipline keeps part two thousand identical to part one.
- Prototype and small-lot builds
- Volume quartz, silicon and ceramic parts
- Space-grade metal and plastic machining
- Full contract manufacturing and assembly
Keep the tool running
Replacement quartzware and silicon parts, plus cleaning and refurbishment of the parts you already own — often the faster and cheaper of the two. Component repair covers what cannot simply be swapped.
- Replacement consumables to OEM form and fit
- Chamber parts cleaning and requalification
- ESC, bellows, heater and valve repair
- On-site equipment support and PM programmes
Fabrication
Three material families, one shop floor.
Colour-coded throughout the site: teal is quartz, steel is silicon, amber is ceramic. Most chamber kits mix all three, and so do most of our quotes.
Quartzware
Windows, tubes, tanks, rings, liners, cleaning basins, insulators, pedestals, injectors and covers — for diffusion, thin film, wet clean and wafer transport. Machine-finished or flame-polished.
Quartz capability → SiliconSilicon parts & wafers
Mono-cast ingot grown in house, machined into focus rings, edge rings and electrodes. Plus wafer services from 25 mm to 450 mm — cutting, grinding, polishing, bonding and cleaning.
Silicon capability → CeramicsTechnical ceramics
Alumina, zirconia, silicon nitride, silicon carbide and sapphire, machined for the places where metals and plastics give up — combined thermal, electrical, mechanical and chemical load.
Ceramics capability →Service
Restoring a part is usually faster than sourcing one.
Chamber hardware does not fail all at once. Most of it degrades — coating wears, surfaces load up with process residue, particle counts drift. Cleaning and resurfacing puts a known part back in a known state, with data attached, in less time than a new part takes to arrive.
We run eleven cleaning methods, four ultrasonic frequencies, and finish to ASTM E-595 high-UV ready or ASTM A380 passivation where the application calls for it. Final clean is Class 1000; inspection and packaging is Class 100.
Material pedigree
Fabs qualify the quartz before they qualify the fabricator.
We are one of the largest authorised fabricators of GE quartz, and stock the grades that actually get specified. Wafer substrates come from Shin-Etsu, SUMCO and GlobalWafers. Nothing enters the process without a traceable source.
General-purpose clear fused, the workhorse grades for tubes and liners.
Where alkali migration into the process is the limiting factor.
For the tightest contamination budgets in diffusion and thermal.
Saint-Gobain, Heraeus and Tosoh, clear fused and opaque.
Why an independent
We do not compete with our customers.
Several of the larger silicon-parts suppliers are owned by equipment makers. That is an awkward arrangement if you build tools too. Advance Semiconductor is independent, US-headquartered, and small enough that a fifty-piece order is worth doing properly.
Independent ownership
No OEM parent, no conflict of interest, no part of your drawing package sitting inside a competitor.
US base, Asian capacity
Engineering and fast-turn work in Santa Clara; volume fabrication at VSIP, Vietnam. A dual-source structure without a China dependency.
Small lots taken seriously
Prototypes, single replacements and fifty-piece runs quoted with the same process as volume work — because that is how qualification starts.
Next step
Send the drawing, or the part number.
Either is enough to start. If you have neither, tell us the tool and the process and we will work back from there.